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北京大学微处理器研究开发中心地址 北京大学理科1号楼1814-1818( 邮编 100871).
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地址 北京大学理科1号楼1814-1818( 邮编 100871).
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2015年6月9日，美国工程院院士、美国电气与电子工程学会会士 IEEE Fellow 、国际光学工程学会会士 SPIE Fellow 、台湾 中央研究院 院士、台湾工业技术研究院院士、台湾积体电路制造公司研发副总林本坚博士莅临北京大学信息技术与信息化名家讲坛 第50期 ，在理科2号楼2129报告厅做了题为 纳米光刻技术的精髓 Essence of micro/nano lithography 的学术报告。 林本坚院士以光刻技术从最初微米级别几何结构发展到纳米尺度的历史为切入点，深刻剖析了焦点缩放的分辨率与深度、E-D树与E-D森林、倍增空间频率的方法、浸润式光刻以及极紫外光刻等关键技术创新的背景及基本原理，明确了纳米光刻相关技术的着眼点及突破口 同时，结合自己在国际商业机器公司 IBM 和台积电公司从事科研的人生经历，分享了浸润式光刻等技术发展背后的实验故事，给在场听众以极大的启发。 随后，他向有关单位赠送了自己的英文专著 光学光刻 Optical Lithography。
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This is an example of a WordPress page, you could edit this to put information about yourself or your site so readers know where you are coming from. You can create as many pages like this one or sub-pages as you like and manage all of your content inside of WordPress. Posted on August 19, 2014. Welcome to WordPress. This is your first post. Edit or delete it, then start blogging! Posted on August 19, 2014.
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